2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[B-2-3]Effect of TEOS treatment on the properties of periodic nanoporous silica low-k film
Yoshiaki Oku, Kazuhiro Yamada, Norikazu Nishiyama, Shunsuke Tanaka, Korekazu Ueyama, Nobuhiro Hata, Takamaro Kikkawa(1.MIRAI Project, ASET, 2.Graduate School of Engineering Science, Osaka University, 3.MIRAI Project, ASRC, AIST, 4.RCNS, Hiroshima University)
