2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[B-2-5]Influence of Surface Oxide of Sputtered TaN Film on Displacement Plating of Cu
Zenglin Wang, Hiroyuki Sakaue, Shoso Shingubara, Talayuki Takahagi(1.Graduate School of Advanced Science of Matter, Hiroshima University)
