2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[C-1-2]A Novel TEM/AFM/STM Microscopy for Cu Nano-Wire Electromigration
Satoru FUJISAWA, Takamaro KIKKAWA, Tokushi KIZUKA(1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 2.Research Center for Nanodevices and Systems, Hiroshima University, 3.Institute of Materials Science, University of Tsukuba)
