2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[C-1-3]Lattice Strain in Scaled Devices Revealed by Using Convergent-Beam Electron Diffraction
Akio Toda, Kensuke Okonogi, Nobuyuki Ikarashi, Haruhiko Ono(1.Silicon Systems Research Laboratories, NEC Corporation, 2.Device Development Department, Device Development Division, Elpida Memory Inc.)
