International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan

International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan

[C-1-5]Microscopic identification of implantation damage centers in Si ULSIs

Takahide Umeda, Yasunori Mochizuki(1.Silicon Systems Research Lab., NEC Corporation)

https://doi.org/10.7567/SSDM.2002.C-1-5