2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[C-2-1]High-Resolution Compositional Profiling of High-к Gate Stack Structures
T. Nishimura, D. Starodub, T. Gustafsson, E. Garfunkel(1.Departments of Chemistry and Physics, Rutgers University)
