2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[C-2-3]Water Absorption into ALD-Al2O3 Films as revealed by Physical Analysis and Electrical Characterization
Masaru Kadoshima, Masayasu Nishizawa, Tetsuji Yasuda, Toshihide Nabatame, Akira Toriumi(1.MIRAI Project, Association of Super-Advanced Electronics Technologies (ASET), 2.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Department of Materials Science School of Engineering, University of Tokyo)
