2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[C-2-5]New Method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement
Koji Kita, Masashi Sasagawa, Kentaro Kyuno, Akira Toriumi(1.Department of Materials Science, Graduate School of Engineering, The University of Tokyo)
