2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[D-1-5]Notable Advantages of High Performance SOI Technology beyond 90nm Generation
Hee-Sung Kang, Chang-Bong Oh, Young-Wug Kim, Kyung-Soo Kim, Kwang-Pyuk Suh(1.Technology Development PJT, System LSI Division, Semiconductor Business, Samsung Electronics Co. Ltd.)
