2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
2002 International Conference on Solid State Devices and Materials
Sep 17 - Sep 19, 2002Nagoya Congress Center, Nagoya, Japan
[F-1-4]Bonding Process for Nano-Scale Wiring using Carbon Nano-Tube by Scanning Tunneling Microscope Tip
N. Aoki, J. Takayama, M. Kida, K. Horiuchi, S. Yamada, T. Ida, K. Ishibashi, Y. Ochiai(1.Department of Materials Technology & Center for Frontier Electronics and Photonics, Chiba University, 2.Corporate Research Center, Fuji-Xerox Co. Ltd., 3.School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), 4.Semiconductor Laboratory, RIKEN)
