2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[A-1-4]Dopant Profile Design Methodology for 65 nm Generation via Inverse Modeling
Takuji Tanaka, Mitsuru Yamaji, Hiroyuki Kanata, Yukio Tagawa, Shigeo Satoh, Toshihiro Sugii(1.FUJITSU Ltd.)
