2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[A-5-1]Successful CMOS Operation of Dopant-Segregation Schottky Barrier Transistors (DS-SBTs)
A. Kinoshita, Y. Tsuchiya, A. Yagishita, K. Uchida, J. Koga(1.Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation, 2.Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation)
