2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[A-7-1]Investigation of Degradation model for Ultra -thin Gate Dielectrics
Hiroko Mori, Hideo Ehara, Naoyoshi Tamura, Chioko Kaneta, Hideya Matsuyama, Ken Shono(1.FUJITSU LSI Quality Assurance Div., 2.FUJITSU Laboratories Ltd.)
