2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[A-7-2]Thermal Stability of Metal Gate Work Functions
H.Y. Yu, Chi Ren, J.F. Kang, Yee-Chia Yeo, Daniel S.H. Chan, M.F. Li, Dim-Lee Kwong(1.Silicon Nano Device Lab, Dept. of Electrical & Computer Eng., National University of Singapore, 2.Institute of Microelectronics, 3.Dept. of ECE, The University of Texas)
