2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[A-7-3]Robust TiN/AHO/HSG-Cylinder Capacitor for High Density DRAMs
S.G. Kim, C.S. Hyun, D. Park, H.J. Moon, H.C. Kim, S.J. Kim, T.H. Cho, H.J. Kang, S.M. Jeong, S.W. Lee, S.H. Lee, J.G. Suk, B.K. Lim, Y.S. Jeon, S.G. Jeon, K.Y. Lee, K.S. Oh, W.S. Lee(1.DRAM Process Architecture Team, 2.Fab Team 3, 3.SRAM/Flash Process Architecture Team, Memory Division, Samsung Electronics Co., Ltd.)
