2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[A-8-2]A Novel STI Process from the View Point of Total Strain Process Design for 45nm Node Devices and Beyond
M. Ishibashi, K. Horita, M. Sawada, M. Kitazawa, M. Igarashi, T. Kuroi, T. Eimori, K. Kobayashi, M. Inuishi, Y. Ohji(1.Process Technology Development Div, Renesas Technology Corp.)
