2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[B-1-5]1.2nm HfSiON/SiON stacked gate insulators for 65nm-node MISFETs
Motofumi Saitoh, Nobuyuki Ikarashi, Heiji Watanabe, Shinji Fujieda, Hirohito Watanabe, Toshiyuki Iwamoto, Ayuka Morioka, Takashi Ogura, Masayuki Terai, Koji Watanabe, Makoto Miyamura, Toru Tatsumi, Taeko Ikarashi, Koji Masuzaki, Yukishige Saito, Yuko Yabe(1.System Devices Research Laboratories, NEC Corp.)
