2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[B-2-1]Carbon nanotube technologies for future ULSI via interconnects
Yuji Awano, Mizuhisa Nihei, Shintaro Sato, Akio Kawabata, Daiyu Kondo, Mari Ohfuti, Naoki Yokoyama(1.Fujitsu Limited, 2.Nanotechnology Research Center, Fujitsu Laboratories Ltd.)
