2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[B-2-5]A Metallurgical Prescription Suppressing Stress-induced Voiding (SIV) in Cu lines
Mari Abe, Naoya Furutake, Shinobu Saito, Naoya Inoue, Yoshihiro Hayashi(1.System Devices Research Laboratories, NEC Corporation)
