2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
2004 International Conference on Solid State Devices and Materials
Sep 14 - Sep 17, 2004Tower Hall Funabori, Tokyo, Japan
[P5-11]Precise Depth Profiling of Sub-keV Implanted Arsenic
Takanori Eto, Kentaro Shibahara(1.Research Center for Nanodevices and Systems, Hiroshima University)
