2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
[A-1-1]Current Status and Addressing the Challenges of Hf-based Gate Stack toward 45nm-LSTP Application
M. Niwa, R. Mitsuhashi, K. Yamamoto, S. Hayashi, Y. Harada, A. Rothchild, T. Hoffmann, S. Kubicek, S. De Gendt, M. Heyns, S. Biesemans, M. Kubota(1.Matsushita assignee at IMEC, 2.Semiconductor Company, Matsushita Electric Ind.,Co., Ltd., 3.IMEC vzw)
