2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
[A-2-3]Influences of initial bulk traps on Negative Bias Temperature Instability of HfSiON
Izumi Hirano, Takeshi Yamaguchi, Yuichiro Mitani, Ryosuke Iijima, Katsuyuki Sekine, Mariko Takayanagi, Kazuhiro Eguchi, Noburu Fukushima(1.Advanced LSI Technology Laboratory, Corporate R&D Center, 2.Semiconductor Company, Toshiba Corporation)
