2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
[A-5-4]Reliable Extractions of EOT and Vfb in Poly-Si Gate High-k MISFETs through Advanced Modeling of Gate and Substrate Capacitances
N. Yasuda, H. Ota, T. Horikawa, T. Nabatame, H. Satake, A. Toriumi, Y. Tamura, T. Sasaki, F. Ootsuka(1.MIRAI-ASET, AIST, 2.MIRAI-ASRC, AIST, 3.University of Tokyo, 4.Selete, AIST)
