2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
[A-7-1]Atomic Layer Deposition of PMOS Metal Gate Electrodes and High-k/Metal Interface Reactions for Advanced Device Applications
G.N. Parsons, K.J. Park, D.B. Terry(1.Department of Chemical and Biomolecular Engineering North Carolina State University)
