2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
2005 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2005International Conference Center Kobe, Kobe, Japan
[A-8-2]Ta-based metal gates (Ta, TaBx, TaNx and TaCx) -Modulated Work Function and Improved Thermal Stability-
Reika Ichihara, Yoshinori Tsuchiya, Yuuichi Kamimuta, Masato Koyama, Akira Nishiyama(1.Advanced LSI Technology Laboratory, Toshiba Corp.)
