2006 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2006PACIFICO Yokohama, Yokohama, Japan
2006 International Conference on Solid State Devices and Materials
Sep 12 - Sep 15, 2006PACIFICO Yokohama, Yokohama, Japan
[A-1-3]High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy
Li Zhang, Kazuya Ohuchi, Kanna Adachi, Mitsuhiro Tomita, Kazunari Ishimaru, Mariko Takayanagi, Akira Nishiyama(1.Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation, 2.Center For Semiconductor Research & Development, Toshiba Corporation Semiconductor Company)
