2006 International Conference on Solid State Devices and Materials

2006 International Conference on Solid State Devices and Materials

Sep 12 - Sep 15, 2006PACIFICO Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
2006 International Conference on Solid State Devices and Materials

2006 International Conference on Solid State Devices and Materials

Sep 12 - Sep 15, 2006PACIFICO Yokohama, Yokohama, Japan

[A-3-1]New Approach to Experimental Nanomechanics Using MEMS Technology

Yoshitada Isono(1.Department of Micro System Technlogy, Ritsumeikan University)
https://doi.org/10.7567/SSDM.2006.A-3-1
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