2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-3-1]A Study of NBTI and PBTI (Charge Trapping) in High k Stacks with NiSi, TiN, Re Gates
S. Zafar, Y. H. Kim, V. Paruchuri, V. Narayanan, B. Doris, A. Callegari, J. Stathis, T. Ning(1.IBM Semiconductor Research & Development Center (SRDC), Research Division)
