J.K. Schaeffer, W.J. Taylor, S.B. Samavedam, D.C. Gilmer, D.H. Triyoso, R.I. Hegde, S. Kalpat, C. Capasso, M. Sadd, M. Stoker, A. Haggag, D. Roan, B.E. White Jr.(1.Silicon Technology Solutions, 2.Freescale Semiconductor)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF K. Tai, S. Yamaguchi, K. Tanaka, T. Hirano, I. Oshiyama, S. Kazi, T. Ando, M. Nakata, M. Yamanaka, R. Yamamoto, S. Kanda, Y. Tateshita, H. Wakabayashi, Y. Tagawa, M. Tsukamoto, H. Iwamoto, M. Saito, N. Nagashima, S. Kadomura(1.Semiconductor Technology Development Division, Semiconductor Business Group, Sony Corporation)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF N. Kitano, H. Arimura, S. Horie, T. Hosoi, T. Shimura, H. Watanabe, T. Kawahara, S. Sakashita, Y. Nishida, J. Yugami, T. Minami, M. Kosuda(1.Graduate School of Engineering, Osaka University, 2.Renesas Technology Corporation, 3.Canon ANELVA Corporation)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF C. S. Park, S. C. Song, C. Burham, H. B. Park, H. Niimi, B. S. Ju, J. Barnett, C. Y. Kang, P. Lysaght, G. Bersuker, R. Choi, H. K. Park, H. Hwang, B. H. Park, S. Kim, P. Kirsch, B. H. Lee, R. Jammy(1.UT/Austin, 2.Samsung Assignee, 3.TI Assignee, 4.GIST, Korea, 5.Poongsan Microtec, 6.IBM Assignees)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF B. P. Linder, V. Narayanan, V. K. Paruchuri, E. Cartier, S. Kanakasabapathy(1.IBM Semiconductor Research and Development Center, Research Division, 2.T. J. Watson Research Center, Yorktown Heights)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Hiroshi Matsubara, Hiroshi Kumagai, Satoshi Sugahara, Mitsuru Takenaka, Shin-ichi Takagi(1.Graduate School of Frontier Science, The University of Tokyo, 2.Graduate School of Science and Technology, Tokyo Institute of Technology, 3.School of Engineering, The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Sho Suzuki, Koji Kita, Hideyuki Nomura, Tomonori Nishimura, Akira Toriumi(1.Department of Materials Engineering, School of Engineering, The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF N. Taoka, Y. Yamashita, M. Harada, K. Ikeda, T. Yamamoto, N. Sugiyama, S. Takagi(1.MIRAI-ASRC, 2.MIRAI-ASET, 3.The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Tatsuro Maeda, Yukinori Morita, Shinichi Takagi(1.MIRAI, Advanced Semiconductor Research Center - National Institute of Advanced Industrial Science and Technology (ASRC-AIST), AIST Tsukuba Central 4, 2.The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Toshitake Takahashi, Yi Zhao, Tomonori Nishimura, Koji Kita, Akira Toriumi(1.Department of Materials Engineering, School of Engineering, The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Ruilong Xie, Chunxiang Zhu(1.Silicon Nano Device Lab, Dept of Electrical and Computer Engineering National University of Singapore)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF S. Zafar, Y. H. Kim, V. Paruchuri, V. Narayanan, B. Doris, A. Callegari, J. Stathis, T. Ning(1.IBM Semiconductor Research & Development Center (SRDC), Research Division)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Motoyuki Sato, Kikuo Yamabe, Kenji Shiraishi, Seiichi Miyazaki, Keisaku Yamada, Chihiro Tamura, Ryu Hasunuma, Seiji Inumiya, Takayuki Aoyama, Yasuo Nara, Yuzuru Ohji(1.Semiconductor Leading Edge Technologies, Inc. (Selete), 2.Univ. of Tsukuba, 3.Hiroshima Univ., 4.Waseda Univ.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Takashi Onizawa, Motoyuki Sato, Takayuki Aoyama, Takahisa Eimori, Yasuo Nara, Yuzuru Ohji(1.Semiconductor Leading Edge Technologies, Inc.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF C. Y. Kang, P. Kirsch, D. Heh, C. Young, P. Sivasubramani, G Bersuker, S.C. Song, R. Choi, B. H. Lee, J. Lichtenwalner, J. S. Jur, A. I. Kingon, R. Jammy(1.IBM Assignee, 2.Dept. of Materials Science and Engineering, North Carolina State University)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF T. Noda, W. Vandervorst, S. Felch, V. Parihar, C. Vrancken, S. Severi, T. Y. Hoffmann, A. Falpin, B. van Daele, T. Jannssens, H. Bender, P. Eyben, M. Niwa, R. Schreutelkamp, F. Nouri, P. P. Absil, M. Jurczak, K. De Meyer, S. Biesemans(1.Matsushita Electric Industrial Co., Ltd., 2.IMEC, 3.Applied Materials)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Nobuyuki Ikarashi, Makiko Oshida, Makoto Miyamura, Motofumi Saitoh, Akira Mineji, Seiichi Shishiguchi(1.NEC Corporation, Device Platforms Research Laboratories, 2.NEC Electronics Corporation, Process Technology Division)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF N. Loubet, S. Denorme, A. Pouydebasque, F. Leverd, P. Gouraud, C. Tallaron, T. Skotnicki, D. Dutartre(1.STMicroelectronics, 2.NXP Semiconductors)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Kyong Taek Lee, Chang Yong Kang, Rino Choi, Seung Chul Song, Byoung Hun Lee, Hi-Deok Lee, Yoon-Ha Jeong(1.Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), 2.SEMATECH, 3.IBM assignee, 4.Dept. of Electronics Engineering, Chungnam National Univ, Korea, 5.University of Texas at Austin)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Minseok Jo, Hokyung Park, Man Chang, Hyung-Suk Jung, Jong-Ho Lee, Hyunsang Hwang(1.Gwangju Institute of Science and Technology, 2.Advanced process Development Team, System LSI Division, Samsung Electronics Company, Ltd., Korea.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Koji Eriguchi, Masayuki Kamei, Daisuke Hamada, Kenji Okada, Kouichi Ono(1.Graduate School of Engineering, Kyoto University, 2.MIRAI-AIST)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF N. Mise, T. Matsuki, T. Watanabe, T. Robata, T. Morooka, T. Eimori, Y. Nara(1.Semiconductor Leading Edge Technologies, Inc.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Takashi Nakayama(1.Department of Physics, Chiba University)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Wenwu Wang, Koji Akiyama, Wataru Mizubayashi, Minoru Ikeda, Hiroyuki Ota, Toshihide Nabatame, Akira Toriumi(1.MIRAI-ASRC, 2.MIRAI-ASET, 3.The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Tomonori Nishimura, Koji Kita, Akira Toriumi(1.Department of Materials Engineering, School of Engineering, The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF K. Shiraishi, Y. Akasaka, G. Nakamura, M. Kadoshima, H. Watanabe, K. Ohmori, T. Chikyow, K. Yamabe, Y. Nara, Y. Ohji, K. Yamada(1.Graduate School of Pure and Applied Sciences, Univ. of Tsukuba, 2.CREST, Japan Science and Technology Agency, 3.Semiconductor Leading Edge Technology Inc., 4.Graduate School of Engineering, Osaka University, 5.Nanotechnology Research Laboratories, Waseda University, 6.National Institute of Materials Science, 7.Present address: Tokyo Electron Inc.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Dai Ishikawa, Satoshi Kamiyama, Atsushi Sano, Sadayoshi Horii, Takayuki Aoyama, Yasuo Nara(1.Research Dept. 1, Semiconductor Leading Edge Technologies (Selete), Inc., 2.Research Dept. 2, Semiconductor Equipment System Lab., Hitachi Kokusai Electric Inc.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF I. Oshiyama, K. Tai, T. Hirano, S. Yamaguchi, K. Tanaka, Y. Hagimoto, T. Uemura, T. Ando, K. Watanabe, R. Yamamoto, S. Kanda, J. Wang, Y. Tateshita, H. Wakabayashi, Y. Tagawa, M. Tsukamoto, H. Iwamoto, M. Saito, M. Oshima, S. Toyoda, N. Nagashima, S. Kadomura(1.Semiconductor Technology Development Division, Semiconductor Business Group, Sony Corporation, 2.Graduate School of Engineering, University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF X.P. Wang, M.-F. Li, H.Y. Yu, J.J. Yang, C.X. Zhu, W.S. Hwang, W.Y. Loh, A.Y. Du, J.D. Chen, Albert Chin, S. Biesemans, G.Q. Lo, D.-L. Kwong(1.SNDL, ECE Dept, National University of Singapore, 2.Institute of Microelectronics, Singapore, 3.IMEC, 4.Dept. of Microelectronics, Fudan University, 5.Dept. of Electronics Eng., Nat’l Chiao-Tung Univ.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF M. Muller, C. Hobbs, A. Zauner, S. Barnola, T. Salvetat, S. Lhostis, S. Couderc, P. Perreau, D. H. Triyoso, M. Raymond, E. Luckowski, M. Rafik, A. Cathignol, G. Ribes, D. Fleury, K. Romanjek, S. Pokrant, S. Jullian, P. Morin, M. Aminpur, P. Gouraud, C. Laviron, S. Zoll, P. Garnier, F. Salvetti(1.NXP Semiconductors, 2.Freescale, 3.STMicroelectronics, 4.NXP Semiconductors, Research, 5.CEA-LETI, 6.Freescale Semiconductor Inc.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF X.P. Wang, J.J. Yang, H.Y. Yu, M.-F. Li, J.D. Chen, R.L. Xie, C.X. Zhu, A.Y. Du, P.C. Lim, Andy Lim, Y.Y. Mi, Doreen M.Y. Lai, W.Y. Loh, S. Biesemans, G.Q. Lo, D.-L. Kwong(1.SNDL, ECE Dept, National University of Singapore, 2.Institute of Microelectronics, 3.IMEC, 4.Dept. of Microelectronics, Fudan University, 5.Institute of Material Research and Engineering)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Andy E.-J. Lim, Rinus T.P. Lee, Alvin T.Y. Koh, Ganesh S. Samudra, Dim-Lee Kwong, Yee-Chia Yeo(1.Silicon Nano Device Lab., Dept. of Electrical & Computer Engineering, National University of Singapore)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Masakatsu Tsuchiaki, Akira Nishiyama(1.Corporate Research & Development Center, Toshiba Corporation.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF K. Yamamoto, S. Sakashita, Y. Sato, M. Inoue, M. Anma, T. Oosuka, J. Yugami(1.Matsushita Electric Industrial Co., Ltd., 2.RENESAS technology Corp.)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF G. Bidal, M. Muller, S. Denorme, D. Aime, M. Rafik, A. Cathignol, G. Ribes, S. Pokrant, P. Gouraud, T. Kormann, G. Chabanne, C. Blanc, S. Bonnetier, D. Barge, C. Laviron, A. Tarnowka, G. Ghibaudo, F. Boeuf, T. Skotnicki(1.NXP Semiconductors, 2.STMicroelectronics, 3.Freescale, 4.CEA-LETI, 5.IMEP)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Keiji Ikeda, Noriyuki Taoka, Yoshimi Yamashita, Masatomi Harada, Kunihiro Suzuki, Toyoji Yamamoto, Naoharu Sugiyama, Shin-ichi Takagi(1.MIRAI-ASET, 2.MIRAI-ASRC, 3.The University of Tokyo)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF H. Zang, W. Y. Loh, J. D. Ye, T. H. Loh, G. Q. Lo, Byung Jin Cho(1.Silicon Nano Device Lab, Dept of ECE, National University of Singapore, 2.Institute of Microelectronics)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Jeong-Hyong Yi, Saeroonter Oh, H. -S. Philip Wong(1.Center for Integrated Systems and Dept. of Electrical Engineering, Stanford University)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Rui Li, S. J. Lee, D. Z. Chi, M. H. Hong, D. -L. Kwong(1.Silicon Nano Device Lab, Department of ECE, National University of Singapore, 2.Institute of Materials Research and Engineering, 3.Laser Microprocessing Lab, Department of Electrical and Computer Engineering, National University of Singapore, 4.Institute of Microelectronics)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Grace Huiqi Wang, Eng-Huat Toh, Keat-Mun Hoe, S. Tripathy, S. Balakumar, Guo-Qiang Lo, Ganesh Samudra, Yee-Chia Yeo(1.Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singapore)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF S. S. Chung, D. C. Huang, C. S. Lai, C. H. Tsai, P. W. Liu, Y. H. Lin, C. T. Tsai, G. H. Ma, S. C. Chien, S. W. Sun(1.Department of Electronic Engineering, National Chiao Tung University, Taiwan, 2.Chang-Gung University, Taiwan, 3.United Microelectronics Corporation (UMC), Central R&D Division, Taiwan)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF R. Clerc, Q. Rafhay, M. Ferrier, P. Palestri, G. Ghibaudo, L. Selmi(1.IMEP, Minatec-INPG, 2.DIEGM, University of Udine)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Hideaki Tsuchiya, Shin-ichi Takagi(1.Kobe University, Graduate School of Engineering, 2.MIRAI-ASRC, 3.The University of Tokyo, Graduate School of Frontier Science)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Q. Rafhay, P. Palestri, D. Esseni, R. Clerc, L. Selmi(1.IMEP, Minatec-INPG, 2.DIEGM, University of Udine)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Shuichi Toriyama, Nobuyuki Sano(1.Advanced LSI Technology Laboratory, Toshiba Corporation, 2.Institute of Applied Physics, University of Tsukuba)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Gennady Mil'nikov, Nobuya Mori, Yoshinari Kamakura, Tatsuya Ezaki(1.Osaka University, Department of Electrical, Electronic and Informatics Engineering, 2.Hiroshima University)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF H. Fitriawan, S. Souma, M. Ogawa(1.Graduate School of Science and Technology, Kobe University, 2.Department of Electrical and Electronics Engineering, Kobe University)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF Kiyotaka Imai(1.Advanced Device Development Division, NEC Electronics Corporation)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF J.-P. Han, Y. M. Lee, H. Utomo, R. Lindsay, M. Eller, J.C. Kim, V. Sardesai, V. Chan, S. Fang, J. Holt, T.N. Adam, H. Zhuang, W. Wille, Z. Lun, H. Wang, T. Dyer, J. Yan, O.J. Kwon, O.S. Kwon, C.W. Lai, T.J. Tang, S.S. Tan, J. Yuan, J. Li, H. Ng, H. Shang, J. Sudijono, D. Schepis, M. Ieong, Y. Li, J.H. Ku, A. Gutmann, M. Hierlemann(1.Infineon Technologies AG, 2.Chartered Semiconductor Manufacturing Limited, 3.IBM Semiconductor Research and Technology Group, 4.Samsung Elec. Co. Alliances at IBM Semiconductor Research and Development Center (SRDC))
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
Download PDF T. Miyashita, J. Ogura, T. Owada, T. Sakuma, H. Nomura, H. Miyaoka, A. Hasegawa, S. Yamaguchi, S. Satoh(1.Fujitsu Laboratories Ltd., 2.Fujitsu Limited)
2007 International Conference on Solid State Devices and MaterialsTue. Sep 18, 2007
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