2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-3-2]Comprehensive Understanding of PBTI and NBTI reliability of High-k / Metal Gate Stacks with EOT Scaling to sub-1nm
Motoyuki Sato, Kikuo Yamabe, Kenji Shiraishi, Seiichi Miyazaki, Keisaku Yamada, Chihiro Tamura, Ryu Hasunuma, Seiji Inumiya, Takayuki Aoyama, Yasuo Nara, Yuzuru Ohji(1.Semiconductor Leading Edge Technologies, Inc. (Selete), 2.Univ. of Tsukuba, 3.Hiroshima Univ., 4.Waseda Univ.)
