2007 International Conference on Solid State Devices and Materials

2007 International Conference on Solid State Devices and Materials

Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
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International Conference on Solid State Devices and Materials
2007 International Conference on Solid State Devices and Materials

2007 International Conference on Solid State Devices and Materials

Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[A-3-3]Performance and Reliability Improvement by Optimized Nitrogen Content of TaSiNx Metal Gate in Metal/HfSiON nFETs

Takashi Onizawa, Motoyuki Sato, Takayuki Aoyama, Takahisa Eimori, Yasuo Nara, Yuzuru Ohji(1.Semiconductor Leading Edge Technologies, Inc.)
https://doi.org/10.7567/SSDM.2007.A-3-3
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