2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-5-1]Study of Dopant Diffusion and Defect Evolution for Advanced Ultra Shallow Junctions based on Atomistic Modeling
T. Noda, W. Vandervorst, S. Felch, V. Parihar, C. Vrancken, S. Severi, T. Y. Hoffmann, A. Falpin, B. van Daele, T. Jannssens, H. Bender, P. Eyben, M. Niwa, R. Schreutelkamp, F. Nouri, P. P. Absil, M. Jurczak, K. De Meyer, S. Biesemans(1.Matsushita Electric Industrial Co., Ltd., 2.IMEC, 3.Applied Materials)
