2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2007 International Conference on Solid State Devices and Materials
Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-5-3]Si1-xGex/Si Selective Etch with HCl for Thin Si-Channel Transistors Integration
N. Loubet, S. Denorme, A. Pouydebasque, F. Leverd, P. Gouraud, C. Tallaron, T. Skotnicki, D. Dutartre(1.STMicroelectronics, 2.NXP Semiconductors)
