2007 International Conference on Solid State Devices and Materials

2007 International Conference on Solid State Devices and Materials

Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
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International Conference on Solid State Devices and Materials
2007 International Conference on Solid State Devices and Materials

2007 International Conference on Solid State Devices and Materials

Sep 18 - Sep 21, 2007Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[A-9-4]Phase and Composition Control of Ni-FUSI gates by N2 I/I with Double Ni-silicidation

K. Yamamoto, S. Sakashita, Y. Sato, M. Inoue, M. Anma, T. Oosuka, J. Yugami(1.Matsushita Electric Industrial Co., Ltd., 2.RENESAS technology Corp.)
https://doi.org/10.7567/SSDM.2007.A-9-4
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