2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[A-1-1]Ultrathin Body and BOX SOI and SSOI for Low Power Application at the 22nm technology node and below

F. Andrieu1, C. Fenouillet-Béranger1, O. Weber1, S. Baudot1, C. Buj1, J. P. Noel1, O. Thomas1, O. Rozeau1, P. Perreau1, L. Tosti1, L. Brévard1, O. Faynot1(1.CEA-LETI/MINATEC)
https://doi.org/10.7567/SSDM.2009.A-1-1