2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[A-1-3]Counter-doping as a solution for multi threshold voltage on FDSOI MOSFETs with a single TiN/HfO2 gate stack

C. Buj-Dufournet1, F. Andrieu1, O. Faynot1, O. Weber1, F. Allain1, L. Tosti1, C. Fenouillet-Béranger1, D. Lafond1, S. Deleonibus1(1.CEA-LETI/MINATEC)
https://doi.org/10.7567/SSDM.2009.A-1-3