[A-1-3]Counter-doping as a solution for multi threshold voltage on FDSOI MOSFETs with a single TiN/HfO2 gate stack
C. Buj-Dufournet1, F. Andrieu1, O. Faynot1, O. Weber1, F. Allain1, L. Tosti1, C. Fenouillet-Béranger1, D. Lafond1, S. Deleonibus1(1.CEA-LETI/MINATEC)
