International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
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2009 International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[A-2-6]
Experimental Study on I
g
RTS Noise of SiON/HfO
2
/TaN PMOSFETs
L. Zhang
1
, R. Wang
1
, J. Zhuge
1
, R. Huang
1
, T. Yu
1
, P. Kirsch
2
, H. H. Tseng
2
, Y. Wang
1
(1.Peking Univ.(China), 2.SEMATECH(USA))
https://doi.org/10.7567/SSDM.2009.A-2-6
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