2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[A-5-2]A New Diamond-like Carbon (DLC) Ultra-High Stress Liner Technology for Direct Deposition on P-Channel Field-Effect Transistors

B. Liu1, M. C. Yang2, Y. C. Yeo1(1.National Univ. of Singapore(Singapore), 2.Data Storage Inst.(Singapore))
https://doi.org/10.7567/SSDM.2009.A-5-2
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