International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-1-2]Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain

S. Kudo¹, N. Nakanishi¹, Y. Hirose¹, K. Sato¹, T. Yamashita¹, H. Oda¹, K. Kashihara¹, N. Murata¹, T. Katayama¹, K. Asayama¹, J. Komori¹, E. Murakami¹(1.Renesas Tech. Corp.)

https://doi.org/10.7567/SSDM.2009.B-1-2