International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
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2009 International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[B-1-4]
Impact of Si Oxidation States on Dipole Layer at HfO
2
/Si Interface
N. Miyata
1,2
, Y. Abe
2
, T. Yasuda
1
(1.AIST(Japan), 2.Musashi Inst. Of Tech.(Japan))
https://doi.org/10.7567/SSDM.2009.B-1-4
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