International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
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2009 International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[B-1-5]
Evaluation of Effective Work Function of Pt on Bi-layer High-k/SiO
2
Stack Structure using by Backside X-ray Photoelectron Spectroscopy
T. Mori
1
, A. Ohta
1
, H. Murakami
1
, S. Higashi
1
, S. Miyazaki
1
(1.Hiroshima Univ.)
https://doi.org/10.7567/SSDM.2009.B-1-5
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