International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
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2009 International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[B-1-6]
Molecular Dynamics Study of Oxidation Process with SiO emission and incorporation into the Si/SiO
2
System
N. Takahashi
1
, T. Yamasaki
1
, C. Kaneta
1
(1.Fujitsu Labs. Ltd.)
https://doi.org/10.7567/SSDM.2009.B-1-6
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