2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-1-6]Molecular Dynamics Study of Oxidation Process with SiO emission and incorporation into the Si/SiO2 System

N. Takahashi1, T. Yamasaki1, C. Kaneta1(1.Fujitsu Labs. Ltd.)
https://doi.org/10.7567/SSDM.2009.B-1-6