2009 International Conference on Solid State Devices and Materials
Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
2009 International Conference on Solid State Devices and Materials
Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
[B-2-2]Lanthanoid Metal Oxide MIM Capacitors for Precision Analog Circuits: Material Screening, Process Development, and Characterization
J. D. Chen1, J. J. Yang1, R. Wise2, P. Steinmann2, C. Zhu1, Y. C. Yeo1(1.National Univ. of Singapore(Singapore), 2.Texas Instruments Inc.(USA))
