2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-2-5L]Polarized Raman study of mechanical stress distribution in W/TiN metal gate MOSFETs

T. Tada1, V. Poborchii1, T. Matsuki2, J. Yugami2, T. Kanayama1(1.MIRAI-AIST(Japan), 2.Selete(Japan))
https://doi.org/10.7567/SSDM.2009.B-2-5L
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