International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
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2009 International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[B-4-1]
Development of high-k / metal gate CMOS technology in Selete
K. Ikeda
1
, J. Yugami
1
, T. Aoyama
1
, Y. Ohji
1
(1.Selete)
https://doi.org/10.7567/SSDM.2009.B-4-1
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