2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-4-3]Influence of Post Cap-layer Deposition Annealing Temperature on MgO Diffusion in High-k/IFL Stacks

T. Morooka1, T. Matsuki1, T. Nabatame1, J. Yugami1, K. Ikeda1, Y. Ohji1(1.Selete)
https://doi.org/10.7567/SSDM.2009.B-4-3