International Conference on Solid State Devices and Materials
Past Programs
日本語
Help
2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
Back
Event List
2009 International Conference on Solid State Devices and Materials
Detail
2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[B-5-4]
Influence of Gate Electrode Stress on Channel Stress and Device Performance in Gate-First W/TiN Gate MOSFETs
T. Matsuki
1
, J. Yugami
1
, T. Eimori
1
, Y. Nara
1
, K. Ikeda
1
(1.Selete)
https://doi.org/10.7567/SSDM.2009.B-5-4
Download PDF
Back