2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
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International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-6-1]Advanced Low Temperature Raised S/D Epitaxy Using Cyclic and Poly-Selective Techniques

N. Loubet1, P. Khare1, Q. Liu1, M. Takayanagi2, R. Sampson1(1.STMicroelectronics(USA), 2.Toshiba America Electronic Components(USA))
https://doi.org/10.7567/SSDM.2009.B-6-1
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