2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-6-2]Impact of Very Low Series Resistance due to Raised Metal S/D Structure with Very Low Contact Resistance Silicide for sub-100-nm nMOSFET

R. Kuroda1, T. Isogai1, H. Tanaka1, Y. Nakao1, A. Teramoto1, S. Sugawa1, T. Ohmi1(1.Tohoku Univ.)
https://doi.org/10.7567/SSDM.2009.B-6-2