International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
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2009 International Conference on Solid State Devices and Materials
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2009 International Conference on Solid State Devices and Materials
Oct 6
- Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan
[B-6-2]
Impact of Very Low Series Resistance due to Raised Metal S/D Structure with Very Low Contact Resistance Silicide for sub-100-nm nMOSFET
R. Kuroda
1
, T. Isogai
1
, H. Tanaka
1
, Y. Nakao
1
, A. Teramoto
1
, S. Sugawa
1
, T. Ohmi
1
(1.Tohoku Univ.)
https://doi.org/10.7567/SSDM.2009.B-6-2
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