2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan
International Conference on Solid State Devices and Materials
2009 International Conference on Solid State Devices and Materials

2009 International Conference on Solid State Devices and Materials

Oct 6 - Oct 9, 2009Sendai Kokusai Hotel, Miyagi, Japan

[B-6-3]First LSI Applicable Thin SOI Films Formed by Lateral Solid Phase Epitaxy

H. Ishida1, F. Aiso1, M. Mizukami1, K. Nishihara1, T. Iguchi1, D. Ichinose1, A. Fukumoto1, T. Suzuki1, F. Arai1, I. Mizushima1(1.Toshiba Corp.)
https://doi.org/10.7567/SSDM.2009.B-6-3